Non-contact, non-destructive implant monitor PMR-3000
We will conduct non-contact and non-destructive inspections of dose amount monitoring after implantation and junction depth measurements before and after annealing treatment.
**Principle of the Device** ■ The Generation Laser generates excess minority carriers and heats areas where obvious damage exists. ■ The excess minority carrier gradient forms the refractive index gradient. ■ The Probe Laser utilizes the refractive index gradient or surface thermal information to measure junction depth, dose level, and PAI depth. ■ The Generation Laser is modulated at 2 kHz, achieving an excellent S/N ratio. ■ The long-wavelength Probe Laser does not heat the sample.
- Company：日本セミラボ 新横浜本社
- Price：Other
